Tunable Vertical Comb for Driving Micromirror Realized by Bending Device Wafer
نویسندگان
چکیده
An electrostatically driven micromirror is described. The vertical comb of a three-dimensional microstructure is realized by bending the device wafer having microstructures. By resetting the bending angle, the tuning of the vertical gap between moving and stationary combs is possible. The characteristics of the vertical comb drive actuator can be tuned, confirming the performance. key words: micromirror, tuning, vertical comb, wafer bending
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ورودعنوان ژورنال:
- IEICE Transactions
دوره 90-C شماره
صفحات -
تاریخ انتشار 2007